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High Precision Ball Screw Linear Actuator

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High Precision Ball Screw Linear Actuator is a high-precision single  linear axis. Linear shaft is indirectly driven by mechanical bearings, providing outstanding accuracy and precision among similar products.

Linear shaft is driven by a high-performance, small tooth groove servo motor, and adopts the feedback control mode of double encoders, which not only has excellent performance, but also is easy to debug. The advanced indirect drive control is based on the encoder technology of Heidelberg Group. This linear shaft also provides excellent mechanical performance for macro motion and micro motion in the full stroke.

Linear shaft also has unique design features and matching functions, such as thermal insulation, high rigidity and micron level hard limit functions, which can fully meet the strict requirements of applications for reliable and safe manufacturing process.
This product is mainly used in the semiconductor industry, and can also meet the needs of many different industries, to meet the high accuracy, high cleanliness, high stability and high precision solutions.

High Precision Ball Screw Linear Actuator is applicable to but not limited to the following applications: round crystal process control applications, such as Overlay measurement, key dimension and film measurement, and photoelectric applications.

You are welcome to  https://www.youtube.com/@tallmanrobotics to watch our video centre for more projects or visit our website to check other series or load down e-catalogues for further technical data. 

High Precision Ball Screw Linear Actuator High Precision Ball Screw Linear Actuator

Model No Max Payload(kgs) Max Stroke

(mm)

Repeatability

(mm)

Drive Solution Motor Power (W)
TMS30 4 400 ±0.01/±0.005 screw 30
TMS45 10 800 ±0.01/±0.005 screw 50/100
TMB45 4 800 ±0.04 belt 50/100
TMS62 20 1050 ±0.01/±0.005 screw 100/200/400
TMB62 16 2000 ±0.04 belt 100/200/400
TMS65 30 800 ±0.01/±0.005 screw 50/100
TMB65 4 800 ±0.04 belt 50/100
TMS85 50 1050 ±0.01/±0.005 screw 100/200/400
TMB85 16 2000 ±0.04 belt 100/200/400
TMS100 65 1050 ±0.01/±0.005 screw 100/200/400
TMB100 40 3500 ±0.04 belt 100/200/400
TMS135 110 1250 ±0.01/±0.005 screw 200/400/750
TMB135 42 3500 ±0.04 belt 200/400
TMS150 120 1500 ±0.01/±0.005 screw 400/750
TMB150 75 3500 ±0.04 belt 400/750
TMS170 130 1500 ±0.01/±0.005 screw 400/750
TMB170 75 3500 ±0.04 belt 400/750
TMS220 150 1500 ±0.01/±0.005 screw 750
TMB220 75 3500 ±0.04 belt 750

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