High Precision Ball Screw Linear Actuator is a high-precision single linear axis. Linear shaft is indirectly driven by mechanical bearings, providing outstanding accuracy and precision among similar products.
Linear shaft is driven by a high-performance, small tooth groove servo motor, and adopts the feedback control mode of double encoders, which not only has excellent performance, but also is easy to debug. The advanced indirect drive control is based on the encoder technology of Heidelberg Group. This linear shaft also provides excellent mechanical performance for macro motion and micro motion in the full stroke.
Linear shaft also has unique design features and matching functions, such as thermal insulation, high rigidity and micron level hard limit functions, which can fully meet the strict requirements of applications for reliable and safe manufacturing process.
This product is mainly used in the semiconductor industry, and can also meet the needs of many different industries, to meet the high accuracy, high cleanliness, high stability and high precision solutions.
High Precision Ball Screw Linear Actuator is applicable to but not limited to the following applications: round crystal process control applications, such as Overlay measurement, key dimension and film measurement, and photoelectric applications.
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Model No | Max Payload(kgs) | Max Stroke
(mm) |
Repeatability
(mm) |
Drive Solution | Motor Power (W) |
TMS30 | 4 | 400 | ±0.01/±0.005 | screw | 30 |
TMS45 | 10 | 800 | ±0.01/±0.005 | screw | 50/100 |
TMB45 | 4 | 800 | ±0.04 | belt | 50/100 |
TMS62 | 20 | 1050 | ±0.01/±0.005 | screw | 100/200/400 |
TMB62 | 16 | 2000 | ±0.04 | belt | 100/200/400 |
TMS65 | 30 | 800 | ±0.01/±0.005 | screw | 50/100 |
TMB65 | 4 | 800 | ±0.04 | belt | 50/100 |
TMS85 | 50 | 1050 | ±0.01/±0.005 | screw | 100/200/400 |
TMB85 | 16 | 2000 | ±0.04 | belt | 100/200/400 |
TMS100 | 65 | 1050 | ±0.01/±0.005 | screw | 100/200/400 |
TMB100 | 40 | 3500 | ±0.04 | belt | 100/200/400 |
TMS135 | 110 | 1250 | ±0.01/±0.005 | screw | 200/400/750 |
TMB135 | 42 | 3500 | ±0.04 | belt | 200/400 |
TMS150 | 120 | 1500 | ±0.01/±0.005 | screw | 400/750 |
TMB150 | 75 | 3500 | ±0.04 | belt | 400/750 |
TMS170 | 130 | 1500 | ±0.01/±0.005 | screw | 400/750 |
TMB170 | 75 | 3500 | ±0.04 | belt | 400/750 |
TMS220 | 150 | 1500 | ±0.01/±0.005 | screw | 750 |
TMB220 | 75 | 3500 | ±0.04 | belt | 750 |